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비전과 가능성을 보여주는 기업

a company that shows vision and possiblity

EFEM

Project Image

 

 

 

EFEM

Description

  • Semi Standard Compliance
  • Fully Integrated System
  • - Mini-Environment
  • - Wafer Transfer Robot (Included Y-Base)
  • - FOUP Opener
  • - Pre-Aligner (Non Contact wafer align)
  • Easy Operating & Maintenance
  • - User I/F with Color Touch Screen
  • - User requested S/W Available
  • High Reliability & Short Cycle Time
  • Easy Interoperability with Main Equipment
  • FOSB / 2FOUP to 4FOUP Available