EFEM
EFEM
Description
- Semi Standard Compliance
- Fully Integrated System
- - Mini-Environment
- - Wafer Transfer Robot (Included Y-Base)
- - FOUP Opener
- - Pre-Aligner (Non Contact wafer align)
- Easy Operating & Maintenance
- - User I/F with Color Touch Screen
- - User requested S/W Available
- High Reliability & Short Cycle Time
- Easy Interoperability with Main Equipment
- FOSB / 2FOUP to 4FOUP Available
