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FURNACE

 

2015년도 실적에 관한 내용
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FIRING FURNACE (FIRE MAX)

Specification

  • Dimension(mm) - 10831(L) X 1700(W) X 2250(H)
  • Wafer Type - Solar Cell Wafer
  • Wafer Size - 156 X 156mm or 161.7 X 161.7mm
  • Belt Width - 505mm
  • Belt Speed - 600 ~ 7200mm/min
  • Conveyor Belt - Stand-off Mesh Belt (material:Inconel)
  • Belt Tension - Automatic Belt tension
  • Exhaust - Dry : Bottom / Firing : Top
  • VOC Removal - Condenser Type, VOCs Oxidizer(Option)
  • Heating Zone - Dry : 5 Zone, Firing : 6 Zone
  • Heat Source - Dryer : Ceramic Heater, Sheath heater. - Firing : IR Lamp
  • Temperature - Dry : 300(Max:400℃). - Firing : 900(Max:1000)
  • Temp. Uniformity - Firing Peak (5~6 Zone)±5℃
  • Coolling Zone - 1 Zone / Water Cooling (Radiator & Fan)
2014년도 실적에 관한 내용

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MINIFURNACE

Description

  • For SiC or GaN Annealing
  • Higher Theoughput (Dual Tube)
  • 6 Zone Fuzzy PID Control (Cascade)
  • Temperature : 300 ~ 1,100℃ Max 1850℃
  • Wafer to Wafer Uniformity : <± 1
  • heating ramp up to 250℃/min
  • batch processing of 2" ~ 6" or any combination
  • batch size up to 40 wafers (2"), 50 wafers (6")
  • vacuum < 1X10-3 Torr
2013년 실적에 관한 내용