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RTA200H-MP1 (Mini RTP)

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RTA200H-MP1 (Mini RTP)

Specification

  • Dimension - 840mm X 1377mm X 1030mm
  • Wafer type - 2" ~ 8" Wafer
  • Heat Source - Halogen IR Lamp
  • Lamp Type - Linear, Top / Bottom Structure
  • Lamp Life Time - >5000hrs
  • Temp Control - Optic Pyrometer
  • Flow Gases - N2 / Spare
  • Process Pressure - ATM & Vacuum (Option)
  • Non metal Contamination

 

 

Heat Performance

  • Control Range - RT ~ 1000℃ Max. 1100℃
  • Ramp Up Rate - <100℃/sec, Max 150℃/sec
  • Ramp Down Rate - <40℃/sec, Max 50℃/sec
  • Process Time - Stable Step Max. 15min
  • Temp. Uniformity - ±2% at Stable Temp
  • Temp Control Accuracy - ±2% at Stable Temp