RTA200H-MP1 (Mini RTP)
RTA200H-MP1 (Mini RTP)
Specification
- Dimension - 840mm X 1377mm X 1030mm
- Wafer type - 2" ~ 8" Wafer
- Heat Source - Halogen IR Lamp
- Lamp Type - Linear, Top / Bottom Structure
- Lamp Life Time - >5000hrs
- Temp Control - Optic Pyrometer
- Flow Gases - N2 / Spare
- Process Pressure - ATM & Vacuum (Option)
- Non metal Contamination
Heat Performance
- Control Range - RT ~ 1000℃ Max. 1100℃
- Ramp Up Rate - <100℃/sec, Max 150℃/sec
- Ramp Down Rate - <40℃/sec, Max 50℃/sec
- Process Time - Stable Step Max. 15min
- Temp. Uniformity - ±2% at Stable Temp
- Temp Control Accuracy - ±2% at Stable Temp
