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비전과 가능성을 보여주는 기업

a company that shows vision and possiblity

RTA300H

 

2015년도 실적에 관한 내용

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RTA300H-SP1

Specification

  • Heat Source - Halogen IR Lamp
  • Lamp Type - Circular type
  • Lamp Life Time - > 10000 hrs
  • Temp Comtrol - Optic Pyrometer
  • Flow Gases - N2 / O2 / Spare
  • Prcess Pressure - ATM or Vacuum [10-3 or 10-5]

Heat Performance

  • Control Range - RT ~ 1000℃ Max. 1100℃
  • Ramp Up Rate - <20℃/sec, Max 50℃/sec
  • Ramp Down Rate - <5 ~ 10℃/sec, Max 30℃/sec
  • Process Time - Stable Step Max. 10min
  • Temp. Uniformity - ±2% at Stable Temp
  • Temp. Overshoot - 50℃

Feature

  • Fast response time using a IR halogen lamp
  • 2" ~ 12" Wafer (SI & Sapphire), Solar Cell
  • ATM / Vacuum [10-3 or 10-5]
  • PID Temperature Control By Pyremeter
  • No Contamination
2014년도 실적에 관한 내용

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RTA300H-AVP1

Specification

  • Heat Source - Halogen IR Lamp
  • Lamp Type - Circular type
  • Lamp Life Time - > 10000 hrs
  • Temp Control - Optic Pyrometer
  • Flow Gases - N2 / O2 / Spare
  • Prcess Pressure - ATM or Vacuum [10-3 or 10-5]

Heat Performance

  • Control Range - RT ~ 1000℃ Max. 1100℃
  • Ramp Up Rate - <10 ~ 30℃/sec, Max 50℃/sec
  • Ramp Down Rate - <5 ~ 10℃/sec, Max 30℃/sec
  • Process Time - Stable Step Max. 15min
  • Temp. Uniformity - ±2% at Stable Temp
  • Temp Control Accuracy - ±2% at Stable Temp

Feature

  • Fast response time using a IR halogen lamp
  • 2" ~ 12" Wafer (SI & Sapphire), Solar Cell
  • ATM / Vacuum [10-3 or 10-5]
  • PID Temperature Control By Pyremeter
  • NO Contamination
2013년 실적에 관한 내용