비전과 가능성을 보여주는 기업

RTA300H-SP1

Specification

• Heat Source - Halogen IR Lamp
• Lamp Type - Circular type
• Lamp Life Time - > 10000 hrs
• Temp Comtrol - Optic Pyrometer
• Flow Gases - N2 / O2 / Spare
• Prcess Pressure - ATM or Vacuum [10-3 or 10-5]

Heat Performance

• Control Range - RT ~ 1000℃ Max. 1100℃
• Ramp Up Rate - <20℃/sec, Max 50℃/sec
• Ramp Down Rate - <5 ~ 10℃/sec, Max 30℃/sec
• Process Time - Stable Step Max. 10min
• Temp. Uniformity - ±2% at Stable Temp
• Temp. Overshoot - 50℃

Feature

• Fast response time using a IR halogen lamp
• 2" ~ 12" Wafer (SI & Sapphire), Solar Cell
• ATM / Vacuum [10-3 or 10-5]
• PID Temperature Control By Pyremeter
• No Contamination