메뉴 건너뛰기

SCROLL TO TOP

비전과 가능성을 보여주는 기업

a company that shows vision and possiblity

SPIKERS R150-A1

Project Image

Project Image

Project Image

 

SPIKERS R150-A1

Specification

  • Wafer type - Silicon Wafer / Solar Cell
  • Heat Source - Halogen IR Lamp
  • Lamp Type - Bar Lamp, Top/Bottom Structure
  • Lamp Life Time - >5000hrs
  • Temp Control - Optic Pyrometer
  • Flow Gases - N2 / O2 / Spare
  • Process Pressure - ATM & Vacuum (Option)

 

Heat Performance

  • Control Range - RT ~ 1000℃ Max. 1100℃
  • Ramp Up Rate - <100℃/sec, Max 150℃/sec
  • Ramp Down Rate - <50℃/sec, Max 70℃/sec
  • Process Time - Stable Step Max. 10min
  • Temp. Uniformity - ±2% at Stable Temp
  • Temp. Overshoot - <5.0℃

 

 

Description

  • Stainless Steel & Aluminum cold wall Chamber (Water Cooling)
  • The upper lamp housing comprised of a total of 12 lamps
  • Lamp housing has a gold coating
  • Gas supplied through the upper quartz window
  • Reactor chamber of a small dimension
  • Automatic Wafer handling
  • Non Contamination